Active
533 Series Multi-Turn Diaphragm Valve
Diaphragm valve for ultra-high purity or corrosive gas applications
5333049-01-001 shown
The 533 Series multi-turn diaphragm valve provides primary flow control for ultra-high purity or corrosive gases. The unique design allows low torque operation with gas flow in either direction. The CONCOA 533 Series multi-turn diaphragm valve is ideal for use in ultra-high purity semiconductor applications, including high-pressure process lines, gas cabinets, and valve manifold boxes.
- Metal-to-metal diaphragm seal prevents contamination
- Bi-directional operation ensures full control under all pressure conditions including vacuum
- Springless design and low wetted surface area minimizes particle generation
- Spectrometric helium leak check verifies leak integrity
- Max inlet pressure: 3500 PSIG (240 BAR)
- Body and connections: Brass barstock; 316L stainless steel; chrome-plated brass barstock; or Silicon CVD coated block-block to valve
- Seats: PCTFE
- Temperature range: -40°F to 140°F (-40°C to 60°C)
- Diaphragm: Elgiloy®
- Cv: 0.17
- Helium leak integrity: 1 x 10⁻⁹ scc/sec
- Seals: Metal-to-metal
- Weight: 0.66 lbs (0.3 kg)
- Conformances: Cleanliness meets or exceeds CGA G-4.1; CRN OC20418.5
◂ scroll to see more ▸
See catalog page for ordering information.
◂ scroll to see more ▸
Related Products
WARNING: This product can expose you to chemicals including Lead, Chromium, Nickel, and 1-3 Butadiene, which are known to the state of California to cause cancer, birth defects, or other reproductive harm. And, this product can expose you to chemicals including Bisphenol A (BPA) which is known to the State of California to cause female reproductive harm. For more information go to www. PSWarnings.ca.gov.
Elgiloy® is a registered trademark of Elgiloy Specialty Metals
5