Skip to main content

page top
See all in Flow Control

533 Series Multi-Turn Diaphragm Valve

Diaphragm valve for ultra-high purity or corrosive gas applications
5333049-01-001 shown

The 533 Series multi-turn diaphragm valve provides primary flow control for ultra-high purity or corrosive gases. The unique design allows low torque operation with gas flow in either direction. The CONCOA 533 Series multi-turn diaphragm valve is ideal for use in ultra-high purity semiconductor applications, including high-pressure process lines, gas cabinets, and valve manifold boxes.

  • Metal-to-metal diaphragm seal prevents contamination
  • Bi-directional operation ensures full control under all pressure conditions including vacuum
  • Springless design and low wetted surface area minimizes particle generation
  • Spectometric helium leak check verifies leak integrity
  • Max inlet pressure: 3500 PSIG (240 BAR)
  • Body and connections: Brass barstock; 316L stainless steel; chrome-plated brass barstock; or Silicon CVD coated block-block to valve
  • Seats: PCTFE
  • Temperature range: -40°F to 140°F (-40°C to 60°C)
  • Diaphragm: Elgiloy®
  • Cv: 0.17
  • Helium leak integrity: 1 x 10⁻⁹ scc/sec
  • Seals: Metal-to-metal
  • Weight: 0.66 lbs (0.3 kg)
  • Conformances: Cleanliness meets or exceeds CGA G-4.1; CRN OC20418.5
◂ scroll to see more ▸ 

See catalog page for ordering information.

◂ scroll to see more ▸ 
Document
Language
ID Number
Revision
Multi-Turn Diaphragm Valves Catalog Page
English
RSMTV
AG
Diaphragm Valves Installation and Operation
English
ADI0002
A
CONCOA SilcoNert® 2000 Brochure
English
SPF900
C
CRN File OC20418
English
CRNOC20418
26

WARNING: This product can expose you to chemicals including Lead, Chromium, Nickel, and 1-3 Butadiene, which are known to the state of California to cause cancer, birth defects, or other reproductive harm. And, this product can expose you to chemicals including Bisphenol A (BPA) which is known to the State of California to cause female reproductive harm. For more information go to www. PSWarnings.ca.gov.

Elgiloy® is a registered trademark of Elgiloy Specialty Metals
5